Chen, Rong ; Kim, Hyoungsub ; McIntyre, Paul C. ; Bent, Stacey F.
Pub. info.:
Integration of advanced micro- and nanoelectronic devices - critical issues and solutions : symposium held April 13-16, 2004, San Francisco, California, U.S.A.. pp.57-62, 2004. Warrendale, Pa.. Materials Research Society