Loh, E. D. ; Biel, J. D. ; Chen, J.-J. ; Davis, M. ; Laporte, R. ; Loh, O. Y.
Pub. info.:
Ground-based instrumentation for astronomy : 21-25 June 2004, Glasgow, Scotland, United Kingdom. pp.1644-1652, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA. pp.537-553, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Photomask and Next-Generation Lithography Mask Technology X. pp.205-212, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering