1.

Conference Proceedings
Conference Proceedings
1. ArF photoresist system: using cycloolefin-alt-maleic anhydride pericyclic acrylate terpolymers
Chang, S. -Y. ; Cheng, K. -L. ; Ho, B. -C. ; Chang, I. -F. ; Chen, J. -H. ; Liu, T. -C. ; Lin, T. -Y.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.1388-1395,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
2.

Conference Proceedings
Conference Proceedings
2. Area measurements for simulation-based dispositioning of masks [5992-184]
Luk-Pat, G. ; Chen, J. -H. ; Morgan, R. ; Schneider, E.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59925C-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
3.

Conference Proceedings
Conference Proceedings
3. Metalorganic chemical vapor deposition and structural/optical characteristics of InGaN/GaN multiple quantum wells grown on sapphire for light emitting diode application
Feng, Z. C. ; Chen, J. -H. ; Tsai, H. -L. ; Yang, J. -R. ; Li, A. G.
Pub. info.: Photonic Materials, Devices, and Applications.  pp.201-211,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5840
4.

Conference Proceedings
Conference Proceedings
4. A simulation-based defect disposition flow for incoming mask quality assurance [5992-185]
Lee, D. ; Chu, B. ; Fang, T. Y. ; Shieh, W. B. ; Hu, S. ; Chen, J. -H. ; Morgan, R.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59925D-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
5.

Conference Proceedings
Conference Proceedings
5. Surface plasmon resonance heterodyne interferometry for measuring physical parameters
Su, D. -C. ; Chen, J. -H. ; Chen, K. -H. ; Lin, J. -Y.
Pub. info.: Optical Metrology in Production Engineering.  pp.566-573,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5457