1.

Technical Paper

Technical Paper
Chen, F. C. ; Jones, J. W. ; McGinn, T. A. ; Kearns, J. E. ; Nielsen, A. J. ; Allison, J. E.
Pub. info.: 1997 SAE International Congress and Exposition : technical paper.  pp.13-21,  1997.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 1997
2.

Conference Proceedings

Conference Proceedings
Huang, P. C. Y. ; Chen, R. C. J. ; Chen, F. C. ; Perng, B. C. ; Shieh, J. H. ; Jang, S. M. ; Liang, M. S.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61520H-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152