Buriak, Jillian M. ; Cheatham, Linda K. ; Graham, John J. ; Gordon, Roy G. ; Barron, Andrew R.
Pub. info.:
Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.. pp.545-550, 1991. Pittsburgh, Pa.. Materials Research Society
Stupik, Paul D. ; Cheatham, Linda K. ; Graha, John J. ; Barron, Andrew R. Barron
Pub. info.:
Chemical vapor deposition of refractory metals and ceramics : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A.. pp.363-368, 1990. Pittsburgh, Pa.. Materials Research Society