1.

Conference Proceedings
Conference Proceedings
1. EVIDENCE FOR OXYGEN CONCENTRATION CHANGES INDUCED BY LOW-TEMPERATURE 0-18 IMPLANTATION INTO A SIMOX BURIED-OXIDE LAYER
Scalon, P. J. ; Hemment, P. L. F. ; Robinson, A. K. ; Reeson, K. J. ; Chater, R. J. ; Kilner, J. A. ; Harbeke, G.
Pub. info.: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.141-146,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 107
2.

Conference Proceedings
Conference Proceedings
2. DETERMINATION OF THE NITROGEN CONTENT OF AS-IMPLANTED AND ANNEALED SIMOX SUBSTRATES
Kilner, J. A. ; Chater, R. J. ; Biswas, S. ; Hemment, P. L. F. ; Reeson, K. J.
Pub. info.: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.151-156,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 107
3.

Conference Proceedings
Conference Proceedings
3. AN INVESTIGATION OF BURIED LAYER FORMATION BY 40keV OXYGEN IMPLANTATION INTO SILICON
Li, Y. ; Kilner, A. ; Chater, R. J. ; Tate, T. J. ; Hemment, P. L. F. ; Nejim, A.
Pub. info.: Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.115-120,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 235
4.

Conference Proceedings
Conference Proceedings
4. TOTAL DIELECTRIC ISOLATION (TDI) OF DEVICE ISLANDS USING SIMOX/SOI TECHNOLOGY
Hemment, P. L. F. ; Robinson, A. K. ; Reeson, K. J. ; Davis, J. R. ; Kilner, J. R. ; Chater, R. J. ; Stoemenos, J.
Pub. info.: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.87-92,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 107