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12 results

Conference Proceedings

1. Micro-electro-mechanical bandpass filters for signal processing by standard CMOS process

Huang,T. ; Chang,P. ; Lee,C. ; Xiao,F.

Pub. info.:	Smart structures and materials 2000 : smart electronics and MEMS : 6-8 March, 2000, Newport Beach, USA. pp.61-68, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3990

Conference Proceedings

2. Applied electrostatic parallelogram actuators for microwave switches by standard CMOS process

Yen,K. ; Chang,C. ; Chang,P. ; Chiou,J. ; Chen,J. ; Lin,H.

Pub. info.:	Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France. Part2 pp.1022-1029, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3680

Conference Proceedings

3. Phase synchronization of micromirror arrays using elastic linkages

Chang,P. ; Liu,C.-W. ; Pao,S.-Y. ; Chen,J.-Y.

Pub. info.:	Smart structures and materials 2000 : smart electronics and MEMS : 6-8 March, 2000, Newport Beach, USA. pp.326-334, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3990

Conference Proceedings

4. Capacitive micropressure sensors with underneath readout circuit using a standard CMOS process

Chang,S. ; Dai,C. ; Chiou,J. ; Chang,P.

Pub. info.:	Smart structures and materials 2001 : smart electronics and MEMS : 5-7 March, 2001, Newport Beach, USA. pp.336-344, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4334

Conference Proceedings

5. Experiments with driving modes for urban robots

Hebert,M. ; MacLachlan,R. ; Chang,P.

Pub. info.:	Mobile robots XIV : 20-22 September 1999, Boston, Massachusetts. pp.140-149, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3838

Conference Proceedings

6. High-aspect-ratio fine-line metallization

Chag,C. ; Chang,P. ; Yen,K. ; Lu,S.

Pub. info.:	Micromachining and microfabrication process technology IV : 21-22 September, 1998, Santa Clara, California. pp.357-363, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3511

Conference Proceedings

7. Integrated eyeball-tracking device

Chen,H. ; Yen,K. ; Chio,J. ; Huang,H. ; Dai,C. ; Chang,C. ; Chang,P.

Pub. info.:	Optoelectronic Materials and Devices II. pp.637-645, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4078

Conference Proceedings

8. Fabrication of a micromachined optical modulator using the CMOS process

Chen,H. ; Yen,K. ; Huang,H. ; Chio,J. ; Dai,C. ; Chang,C. ; Chang,P.

Pub. info.:	Optoelectronic Materials and Devices II. pp.620-626, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4078

Conference Proceedings

9. Fabrication of diffractive optical elements using the CMOS process

Chen,H. ; Huang,H. ; Yen,K. ; Chio,J. ; Dai,C. ; Chang,C. ; Chang,P.

Pub. info.:	Optoelectronic Materials and Devices II. pp.627-636, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4078

10.

Conference Proceedings

10. Wideband microwave switch by micromachining techniques

Chang,C. ; Chang,P. ; Yen,K. ; Lu,S.-S

Pub. info.:	Micromachined Devices and Components IV. pp.229-236, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3514

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