1.

Conference Proceedings
Conference Proceedings
1. Verifying the "correctness" of your optical proximity correction designs
Malhotra,V.K. ; Chang,F.-C.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.130-137,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings
Conference Proceedings
2. Implementation of a simple DAVIC server using Orbix
Chang,F.-C. ; Hang,H.-M.
Pub. info.: Electronic imaging and multimedia systems : 4-5 November 1996, Beijing, China.  pp.73-84,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2898
3.

Conference Proceedings
Conference Proceedings
3. Lithography process calibration with applications in defect printability analysis
Wu,S.-P. ; Liu,H.-Y. ; Chang,F.-C. ; Karklin,L.
Pub. info.: 18th Annual BACUS Symposium on Photomask Technology and Management.  pp.485-491,  1998.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3546
4.

Conference Proceedings
Conference Proceedings
4. Size matters:defect detectability in reticle and wafer inspection including advanced aerial image simulation for defect printability
Almog,E. ; Caldwell,R.F. ; Chang,F.-C. ; Chen,J.F. ; Farrar,N.R. ; Karklin,L. ; Laidig,T.L. ; Sabouri,S. ; Shen,W.P. ; Staud,W. ; Wu,C. ; Zelenko,J.
Pub. info.: 18th Annual BACUS Symposium on Photomask Technology and Management.  pp.139-144,  1998.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3546