1.

Conference Proceedings
Conference Proceedings
1. The Barrier Characteristics of Chemical Vapor Deposited Amorphous Tungsten with In Situ Nitrogen Plasma Treatment
Chang, K-M. ; Deng, I-C ; Yeh, T-H. ; Shih, C-W ; Chien, S-C.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.1559-1565,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
2.

Conference Proceedings
Conference Proceedings
2. MICROSTRUCTURES AND PROPERTIES OF REFRACTORY METAL SILICIDE EUTECTICS
Bewlay, B.P. ; Chang, K-M. ; Sutliff, J.A. ; Jackson, M.R.
Pub. info.: Intermetallic matrix composites II : symposium held April 27-30, 1992, San Francisco, California, U.S.A..  pp.417-424,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 273
3.

Conference Proceedings
Conference Proceedings
3. A Pretreatment Technique to Improving the Ashing Resistance of Low-K Spin-On-Polymer (SOP)
Chang, K-M. ; Chang, Y-H. ; Yang, J-Y.
Pub. info.: Low-dielectric constant materials V : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.217-226,  1999.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 565