1.

Conference Proceedings
Conference Proceedings
1. Modeling Analysis of Excimer Laser Crystallization of a-Si Films with Nanosecond Temperature Response
Chang, C.H. ; Chao, L.S.
Pub. info.: Progress on advanced manufacture for micro/nano technology 2005 : proceedings of the 2005 International Conference on Advanced Manufacture Taipei, Taiwan, R.O.C. November 28th-December 2nd, 2005.  pp.283-288,  2006.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 505-507
2.

Conference Proceedings
Conference Proceedings
2. Effect of Aluminum Coatings on Corrosion Properties of AZ31 Magnesium Alloy
Chiu, L.H. ; Lin, H.A. ; Chen, C.C. ; Yang, C.F. ; Chang, C.H. ; Wu, J.C.
Pub. info.: Magnesium alloys 2003 : proceedings of the Second Osaka International Conference on Platform Science and Technology for Advanced Magnesium Alloys 2003, Osaka, Japan, 26-30, January, 2003.  pp.909-914,  2003.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 419-422
3.

Conference Proceedings
Conference Proceedings
3. Mesa or trench type for chromeless phase-shift lithography from photolithographic performance point of view
Shi, X. ; Chen, J.F. ; Hsu, S. ; Van Den Broeke, D.J. ; Socha, R.J. ; Chang, C.H. ; Dai, C.-M.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part Two  pp.1304-1312,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
4.

Conference Proceedings
Conference Proceedings
4. Specification of the phase angle of a 6% attenuated PSM mask used in ArF lithography
Chang, C.H. ; Schacht, J. ; Lin, B.S.-M ; Hung, K.C. ; Huang, I.H.
Pub. info.: Optical Microlithography XVII.  pp.902-910,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377