1.

Conference Proceedings
Conference Proceedings
1. Numerical Simulation of Silicon Carbide Deposition in a Cold Wall CVD Reactor
Chaix, G. ; Dallet, A. ; Matecki, M. ; de Persis, S. ; Wang, Y. ; Teyssandier, F.
Pub. info.: CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition.  pp.209-215,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-13
2.

Conference Proceedings
Conference Proceedings
2. Three Dimensional Monte Carlo Simulation of β-SiC Deposition from the Vapor Phase
Chaix, G. ; Dollett, A.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.33-40,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13