1.

Conference Proceedings
Conference Proceedings
1. In-line and nondestructive analysis of selectively grown epitaxial Si1-xGex and Si/Si1-xGex layers by spectroscopic ellipsometery and comparison with other established techniques
Loo,R. ; Caymax,M. ; Blavier,G. ; Kremer,S.
Pub. info.: In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II : 31 May-1 June 2001, Edinburgh, UK.  pp.131-140,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4406
2.

Conference Proceedings
Conference Proceedings
2. Characterization of Ultra Thin Layers by Rutherford Backscattering Spectrometry
Brijs,B. ; Deleu,J. ; Connard,T. ; Li,H. ; Loo,R. ; Caymax,M. ; Nakajima,K. ; Kimura,K. ; Vandervorst,W.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.160-169,  1999.  Pennington, N.J..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3895
3.

Conference Proceedings
Conference Proceedings
3. Analysis of Selectively Grown Epitaxial Si1-xGex by Spectroscopic Ellipsometry and Comparison with RBS and SIMS
Loo,R. ; Caymax,M. ; Libezny,M. ; Blavier,G. ; Brijs,B. ; Geene,L. ; Vandervorst,W.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.170-179,  1999.  Pennington, N.J..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3895
4.

Conference Proceedings
Conference Proceedings
4. Lattiee defects in Si1-xGex epitaxial diodes induced by 20-MeV alpha rays
Ohyama,H. ; Vanhellemont,J. ; Simoen,E. ; Claeys,C. ; Takami,Y. ; Hayama,K. ; Sunaga,H. ; Poortmans,J. ; Caymax,M.
Pub. info.: Defects in semiconductors, icds-19 : proceedings of the 19th International Conference on Defects in Semiconductors, Aveiro, Portugal, July 1997.  Part1  pp.121-126,  1997.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 258-263
5.

Conference Proceedings
Conference Proceedings
5. Irradiation Induced Lattice Defects in Si1-xGex Epitaxial Devices
Ohyama,H. ; Vanhellemont,J. ; Takami,Y. ; Hayama,K. ; Kudo,T. ; Hakata,T. ; Kobayashi,K. ; Sunaga,H. ; Poortmans,J. ; Caymax,M.
Pub. info.: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.371-376,  1995.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 196-201