1.

Conference Proceedings
Conference Proceedings
1. Electrical Defects in Atomic Layer Deposited HfO2 Films on Silicon: Influence ofPrecursor Chemistries and Substrate Treatment
Duenas, S. ; Castan, H. ; Garcia, H. ; Bailon, L. ; KuKli, K. ; Ritala, M. ; Leskela, M.
Pub. info.: Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices.  pp.287-299,  2006.  Dordrecht.  Springer
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 220
2.

Conference Proceedings
Conference Proceedings
2. Fabrication of Ta2O5 Thin Films by Anodic Oxidation of Tantalum Nitride and Tantalum Silicide: Growing Mechanisms, Electrical Characterization and ULSI M-I-M Capacitor Performances
Duenas, S. ; Castan, H. ; Barbolla, J. ; Kola, R. R. ; Sullivan, P. A.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.371-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
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Conference Proceedings
Conference Proceedings
3. Radio-Frequency Impedance Analysis of Anodic Tantalum Pentoxide Thin Films
Duenas, S. ; Castan, H. ; Barbolla, J. ; Kola, R.R. ; Sullivan, P.A.
Pub. info.: Electrically based microstructural characterization III : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A..  pp.185-190,  2002.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 699
4.

Conference Proceedings
Conference Proceedings
4. On the Interface Quality of MIS Structures Fabricated From Atomic Layer Deposition of HfO2, Ta2O5 and Nb2O5-Ta2O5-Nb2O5 Dielectric Thin Films
Duenas, S. ; Castan, H. ; Garcia, H. ; Barbolla, J. ; Kukli, K. ; Ritala, M. ; Leskela, M.
Pub. info.: Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A..  pp.147-152,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 786
5.

Conference Proceedings
Conference Proceedings
5. Conductance Transient Comparative Analysis of ECR-PECVD Deposited SiNx, SiO2/SiNx and SiOxNy Dielectric Films on Silicon Substrates
Castan, H. ; Duenas, S. ; Barbolla, J. ; Del Prado, A. ; San Andres, E. ; Martil, I. ; Gonzalez-Diaz, G.
Pub. info.: Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A..  pp.83-88,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 786
6.

Conference Proceedings
Conference Proceedings
6. Conductance-Transient Three-Dimensional Profiling of Disordered Induced Gap States on Metal-Insulator-Semiconductor Structures
Castan, H. ; Duenas, S. ; Barbolla, J. ; Martil, I. ; Gonzalez-Diaz, G.
Pub. info.: Electrically based microstructural characterization III : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A..  pp.231-236,  2002.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 699