Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.488-495, 2001. Pennington, N.J.. Electrochemical Society
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.278-285, 1997. Pennington, NJ. Electrochemical Society
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.1167-1174, 1997. Pennington, NJ. Electrochemical Society
Cavallotti, C. ; Medeossi, C. ; Threoni, C. ; Masi, M. ; Carra, S.
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Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis. pp.46-51, 1998. Pennington, NJ. Electrochemical Society
Valente, G. ; Cavallotti, C. ; Masi, M. ; Carra, S.
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Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.84-91, 2001. Pennington, N.J.. Electrochemical Society
Masi, M. ; Radaelli, G. ; Roda, N. ; Raimondi, P. ; Carra, S. ; Vaccari, G. ; Crippa, D.
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Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.. pp.187-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Properties and processing of vapor-deposited coatings : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A.. pp.321-, 1999. Warrendale, PA.. MRS - Materials Research Society
Masi, Maurizio ; Cavallotti, Carlo ; Radaelli, Guido ; Carra, S.
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Thin-film structures for photovoltaics : symposium held December 2-5, 1997, Boston, Massachusetts, U.S.A.. pp.229-, 1998. Warrendale, Pa.. MRS - Materials Research Society