Hoffmann-Eifert, S. ; Puchalla, J. ; Cattaneo, L. ; Carella, S. ; Waser, R.
Pub. info.:
EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium. pp.982-989, 2005. Pennington, NJ. Electrochemical Society
Bedoya, C. ; Condoretti, G. G. ; Finocchiaro, S. T. ; Di Maura, A. ; Atanasio, D. ; Fragala, I. L. ; Cattaneo, L. ; Carella, S.
Pub. info.:
EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium. pp.975-981, 2005. Pennington, NJ. Electrochemical Society