1.

Conference Proceedings
Conference Proceedings
1. Tradeoffs in MEMS materials
Cabuz,C.
Pub. info.: Microelectronic structures and MEMS for optical processing II : 14-15 October 1996, Austin, Texas.  pp.160-170,  1996.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2881
2.

Conference Proceedings
Conference Proceedings
2. MEMS sensing and control:an aerospace perspective
Schoess,J.N. ; Arch,D.K. ; Yang,W. ; Cabuz,C. ; Hocker,B. ; Johnson,B.R. ; Wilson,M.L.
Pub. info.: Smart structures and materials 2000 : smart electronics and MEMS : 6-8 March, 2000, Newport Beach, USA.  pp.22-27,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3990