1.

Conference Proceedings
Conference Proceedings
1. Study of optical proximity effects using off-axis illumination with attenuated phase shift mask
C.-N. Ahn ; K.-H. Baik ; Y.-S. Lee ; H.-E. Kim ; I.-B. Hur
Pub. info.: Optical/laser microlithography VIII : 22-24 February, 1995, Santa Clara, California.  pp.222-239,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2440
2.

Conference Proceedings
Conference Proceedings
2. Effect of pattern density for contact windows in an attenuated phase shift mask
I.-B. Hur ; J.-H. Kim ; I.-H. Lee ; H.-E. Kim ; C.-N. Ahn
Pub. info.: Optical/laser microlithography VIII : 22-24 February, 1995, Santa Clara, California.  pp.278-289,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2440