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10 results

Conference Proceedings

1. A comparative study for mask defect tolerance on phase and transmission for dry and immersion 193-nm lithography

M. L. Ling ; G. S. Chua ; C. J. Tay ; C. Quan ; Q. Lin

Pub. info.:	Optical microlithography XX. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6520

Conference Proceedings

2. Process window optimization of CPL mask for beyond 45nm lithography

S. Y. Tan ; Q. Lin ; C. J. Tay ; C. Quan

Pub. info.:	Optical microlithography XX. 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6520

Conference Proceedings

3. Customized illumination shapes for 193nm immersion lithography

M. L. Ling ; G. S. Chua ; Q. Lin ; C. J. Tay ; C. Quan

Pub. info.:	Optical Microlithography XXI. 2 pp.692435-1-692435-11, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6924

Conference Proceedings

4. Phase retrieval in digital holographic interterometry based on complex phasor and short time Fourier transform

W. Chen ; C. Quan ; C. J. Tay

Pub. info.:	Ninth International Symposium on Laser Metrology. 1 pp.71551I-1-71551I-14, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7155

Conference Proceedings

5. Temporal Paul wavelet analysis for phase retrieval using shadow moire technique

H. T. Niu ; C. Quan ; C. J. Tay

Pub. info.:	Ninth International Symposium on Laser Metrology. 2 pp.71552B-1-71552B-9, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7155

Conference Proceedings

6. Warpage measurement using projection speckle correlation method and microscopic interferometry

W. Sun ; X. Y. He ; C. Quan

Pub. info.:	ICEM 2008 : International Conference on Experimental Mechanics 2008, 8-11 November 2008, Nanjing, China , editors ; Xiaoyuan He, Huimin Xie, Yilan Kang ; organized by the Chinese Society for Experimental Mechanics [and] Southeast University (China) ; sponsored by Asian Committee of Experimental Mechanics [and] the Chinese Society of Theoretical and Applied Mechanics ; cosponsored by Ministry of Education of China ... [et al.] ; cooperating organization, SPIE.. 2 pp.73753D-1-73753D-7, 2009. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7375

Conference Proceedings

7. Determination of curvature and twist of deformed object by digital holographic interferometry

C. Quan ; W. Chen ; C. J. Tay

Pub. info.:	ICEM 2008 : International Conference on Experimental Mechanics 2008, 8-11 November 2008, Nanjing, China , editors ; Xiaoyuan He, Huimin Xie, Yilan Kang ; organized by the Chinese Society for Experimental Mechanics [and] Southeast University (China) ; sponsored by Asian Committee of Experimental Mechanics [and] the Chinese Society of Theoretical and Applied Mechanics ; cosponsored by Ministry of Education of China ... [et al.] ; cooperating organization, SPIE.. 2 pp.73753H-1-73753H-8, 2009. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7375

Conference Proceedings

8. Profiling of an object using a time-frequency analysis method in digital holographic interferometry

W. Chen ; C. Quan ; C. J. Tay

Pub. info.:	ICEM 2008 : International Conference on Experimental Mechanics 2008, 8-11 November 2008, Nanjing, China , editors ; Xiaoyuan He, Huimin Xie, Yilan Kang ; organized by the Chinese Society for Experimental Mechanics [and] Southeast University (China) ; sponsored by Asian Committee of Experimental Mechanics [and] the Chinese Society of Theoretical and Applied Mechanics ; cosponsored by Ministry of Education of China ... [et al.] ; cooperating organization, SPIE.. 2 pp.73754S-1-73754S-6, 2009. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7375

Conference Proceedings

9. Dynamic measurement of micro-components by image-plane digital holography

Y. Fu ; H. Shi ; C. Quan ; C. J. Tay

Pub. info.:	ICEM 2008 : International Conference on Experimental Mechanics 2008, 8-11 November 2008, Nanjing, China , editors ; Xiaoyuan He, Huimin Xie, Yilan Kang ; organized by the Chinese Society for Experimental Mechanics [and] Southeast University (China) ; sponsored by Asian Committee of Experimental Mechanics [and] the Chinese Society of Theoretical and Applied Mechanics ; cosponsored by Ministry of Education of China ... [et al.] ; cooperating organization, SPIE.. 1 pp.73750T-1-73750T-6, 2009. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7375

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Conference Proceedings

10. Nondestructive evaluation of MEMS components by optical methods

C. J. Tay ; C. Quan ; S. H. Wang

Pub. info.:	ICEM 2008 : International Conference on Experimental Mechanics 2008, 8-11 November 2008, Nanjing, China , editors ; Xiaoyuan He, Huimin Xie, Yilan Kang ; organized by the Chinese Society for Experimental Mechanics [and] Southeast University (China) ; sponsored by Asian Committee of Experimental Mechanics [and] the Chinese Society of Theoretical and Applied Mechanics ; cosponsored by Ministry of Education of China ... [et al.] ; cooperating organization, SPIE.. 1 pp.73752X-1-73752X-6, 2009. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	7375

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Author: C. Quan