1.

Conference Proceedings
Conference Proceedings
1. HCl Assisted Growth of Thick 4H-SiC Epilayers for Bipolar Devices
B. Kallinger ; C. Ehlers ; P. Berwian ; M. Rommel ; J. Friedrich
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.210-213,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
2.

Conference Proceedings
Conference Proceedings
2. Model-free and model-based methods for dimensional metrology during the lifetime of a product
P. Weidner ; A. Kasic ; T. Hingst ; C. Ehlers ; S. Philipp
Pub. info.: Ninth International Symposium on Laser Metrology.  1  pp.71550Y-1-71550Y-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7155