1.

Conference Proceedings
Conference Proceedings
1. Extensive Study of the Correlation between Contact Etch Stop Nitride film Properties and Negative Bias Temperature Instabilities Measured in pMOSFETS
D. Benoit ; P. Morin ; F. Perrier ; C. Chaton ; M. Charleux ; J. Regolini ; K. Barla ; P. Ferreira
Pub. info.: Silicon nitride, silicon dioxide, and emerging dielectrics 9.  pp.355-370,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 6(3)
2.

Conference Proceedings
Conference Proceedings
2. ARC stack development for hyper-NA imaging
V. Farys ; S. Warrick ; C. Chaton ; J. Chapon
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
3.

Conference Proceedings
Conference Proceedings
3. Industrial characterization of scatterometry for advanced APC of 65 nm CMOS logic gate patterning
J. Dabertrand ; M. Touchet ; S. Kremer ; C. Chaton ; M. Gatefait
Pub. info.: Metrology, inspection, and process control for microlithography XXII.  1  pp.69220W-1-69220W-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6922