1.

Conference Proceedings
Conference Proceedings
1. INTERACTION BETWEEN Co AND SiO2 DURING ION-BEAM MIXING AND RAPID THERMAL ANNEALING
Dehm. C. ; Kasko, I. ; Burte, E. P. ; Ryssel, H.
Pub. info.: Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.917-922,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 260
2.

Conference Proceedings
Conference Proceedings
2. Structural and electrical properties of zirconium oxide layers grown by liquid delivery MOCVD
Lisker, M. ; Silinskas, M. ; Matichyn, S. ; Burte, E. P.
Pub. info.: EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium.  pp.865-872,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-09
3.

Conference Proceedings
Conference Proceedings
3. Investigation of the structural and electrical properties of ferroelectric PbZrxTi1-xO3 (PZT) thin fihns grown using liquid delivery metalorganic chemical vapor deposition
Matichyn, S. ; Lisker, M. ; Silinskas, M. ; Burte, E. P.
Pub. info.: EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium.  pp.857-864,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-09
4.

Conference Proceedings
Conference Proceedings
4. Liquid-delivery MOCVD of SBT thin films using novel bismuth precursors
Silinskas, M. ; Lisker, M. ; Matichyn, S. ; Burte, E. P. ; Hyeon, J. ; Lorenz, V. ; Edelmann, F.
Pub. info.: EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium.  pp.881-888,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-09
5.

Conference Proceedings
Conference Proceedings
5. 52 Improvement of Electrical Properties of High-K Strontium Tantalate Films for Gate Dielelectric Applications
Lisker, M. ; Silinskas, M. ; Kalkofen, B. ; Burte, E. P.
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS, new materials, processes, and equipment : proceedings of the international symposium.  pp.426-434,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-05
6.

Conference Proceedings
Conference Proceedings
6. Preparation of silver thin films from vinyltriethylsilane (hexafluoroacetylacetonato)silver(I) using liquid-delivery metalorganic chemical vapor deposition
Huryeva, T. ; Lisker, M. ; Silinskas, M. ; Burte, E. P. ; Kalkofen, B. ; Matichyn, S.
Pub. info.: EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium.  pp.683-690,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-09
7.

Conference Proceedings
Conference Proceedings
7. GOI Impact of Cu, Ni and Al Atoms on the Wafer Surface Prior to RTP and Furnace Oxidations
Aderhold, W. R. ; Shah, N. ; Bogen, S. ; Bauer, A. ; Burte, E. P.
Pub. info.: Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A..  pp.275-,  1996.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 429