1.
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Conference Proceedings
|
Buie,M.J. ; Stoehr,B. ; Huang,Y.-C.
Pub. info.: |
21st Annual BACUS Symposium on Photomask Technology. 4562 pp.633-640, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4562 |
|
2.
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Conference Proceedings
|
Huang,Y.-C. ; Buie,M.J. ; Stoehr,B. ; Buxbaum,A. ; Ruhl,G.
Pub. info.: |
21st Annual BACUS Symposium on Photomask Technology. 4562 pp.624-632, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4562 |
|
3.
|
Conference Proceedings
|
Buie,M.J. ; Stoehr,B. ; Buxbaum,A. ; Ruhl,G.
Pub. info.: |
21st Annual BACUS Symposium on Photomask Technology. 4562 pp.616-623, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4562 |
|
4.
|
Conference Proceedings
|
Buxbaum,A. ; Buie,M.J. ; Stoehr,B. ; Montgomery,W. ; Fuller,S.E.
Pub. info.: |
21st Annual BACUS Symposium on Photomask Technology. 4562 pp.338-352, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4562 |
|