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20 results

Conference Proceedings

1. Development and Implementation of an ISO Modeled Environmental, Health and Safety Management System

Brown, P.T. ; Mendicino, L. ; Nasi, T. ; McCay, T. ; Reblin, R.

Pub. info.:	Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium. pp.197-208, 2000. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-7

Conference Proceedings

2. Continuous Real-Time Detection of Molecular Fluorine (F2) Emitted as a By-Product Of CVD and Etch Processes

Laush, C. ; Vartanian, V. ; Mendicino, L. ; Brown, P.T.

Pub. info.:	Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium. pp.72-81, 2000. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-7

Conference Proceedings

3. Risk-Based Evaluation of Bulk Anhydrous Hydrogen Chloride Delivery Alternatives Used in the Semiconductor Industry

Nauert, C. ; Brown, P.T.

Pub. info.:	Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium. pp.160-173, 2000. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-7

Conference Proceedings

4. Impact of Fluorine from NF3 Based Chamber Cleaning Processes

Brown, P.T. ; Mendicino, L. ; Vartanian, V.

Pub. info.:	Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium. pp.52-59, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-8

Conference Proceedings

5. An Analysis of Fluorinated Compound Emissions Reduction Technologies and Emission Reduction Goals

Beu, L. ; Brown, P.T.

Pub. info.:	Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium. pp.1-9, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-8

Conference Proceedings

6. Remote Plasma Clean Technology for Dielectric CVD Chamber Cleaning to Reduce PFC Emissions

Mendicino, L. ; Brown, P.T. ; Filipak, S. ; Loop, D. ; Basnett, R. ; Holber, W. ; Pearce, R. ; Johnson, A.

Pub. info.:	Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium. pp.40-51, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-8

Conference Proceedings

7. Copper Removal from Chemical Mechanical Polishing Effluent

Riley, C. ; Filson, J. ; Mendicino, L. ; Brown, P.T.

Pub. info.:	Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium. pp.174-184, 2000. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-7

Conference Proceedings

8. Treatability of Chemical Mechanical Planarization (CMP) Wastewater

Brown, P.T. ; Davis, B.J. ; Sue, S.

Pub. info.:	Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium. pp.213-230, 2000. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-7

Conference Proceedings

9. Air Monitoring and Odor Elimination in a Semiconductor Photolithography Area

Brown, P.T. ; Villars, M. ; Sevier, A. ; Kaczmarik, D. ; Mendicino, L.

Pub. info.:	Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium. pp.63-71, 2000. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-7

10.

Conference Proceedings

10. EHS Infrastructure Issues in Modern Wafer Fabs

Brown, P.T. ; Reblin, R. ; Heironimus, J. ; Nauert, C. ; Mendicino, L.

Pub. info.:	Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries : proceedings of the fourth International Symposium. pp.183-198, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-6

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