1.

Conference Proceedings
Conference Proceedings
1. Ion Heating in the Pre-Sheath of a Capacitively Coupled RF Discharge
Brinkmann, R.P. ; Hsiau, K. ; Zheng, J. ; McVittie, J.P.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.46-53,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
2.

Conference Proceedings
Conference Proceedings
2. A Reduced Fluid-Dynamical Discharge Model for Applications in Technology-Oriented CAD
Brinkmann, R.P. ; Furst, R. ; Werner, C. ; Hierlemann, M.
Pub. info.: Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.521-529,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-2