Fleuster, M. ; Buchal, Ch. ; Holzbrecher, H. ; Breuer, U. ; Dinand, M. ; Suche, H. ; Brinkmann, R. ; Sohler, W.
Pub. info.:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.279-284, 1993. Pittsburgh, Pa.. Materials Research Society
Kappius, L. ; Tyagi, A. K. ; Breuer, U. ; Bay, H. L. ; Mantl, S.
Pub. info.:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.225-, 1999. Warrendale, PA. MRS - Materials Research Society