1.
|
Conference Proceedings
|
Brennen,R.A. ; Hecht,M.H. ; Wiberg,D.V. ; Manion,S.J. ; Bonivert,W.D. ; Hruby,J.M. ; Pister,K.S.J. ; Kruglick,E.
Pub. info.: |
Microlithography and Metrology in Micromachining. pp.226-235, 1995. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
2640 |
|
2.
|
Conference Proceedings
|
Brennen,R.A. ; Hecht,M.H. ; Wiberg,D.V. ; Manion,S.J. ; Bonivert,W.D. ; Hruby,J.M. ; Scholz,M.L. ; Stowe,T.D. ; Kenny,T.W. ; Jackson,K.H. ; Malek,C.Khan
Pub. info.: |
Microlithography and Metrology in Micromachining. pp.214-225, 1995. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
2640 |
|