1.

Conference Proceedings
Conference Proceedings
1. HYDROGEN PASSIVATION OF Si (100) BY REMOTE HYDROGEN PLASMA TREATMENT
Hsu, T. ; Anthony, B. ; Breaux, L. ; Qian, R. ; Baner-jee, S. ; Tasch, A. ; Lin,. S. ; Marcus, H. L.
Pub. info.: Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A..  pp.279-284,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 190
2.

Conference Proceedings
Conference Proceedings
2. RHEED OBSERVATIONS OF SILICON (100) SURFACE RECONSTRUCTION AFTER REMOTE HYDROGEN PLASMA CLEANING
Hsu, T. ; Breaux, L. ; Anthony, B. ; Banerjee, S. ; Tasch, A.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.161-166,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
3.

Conference Proceedings
Conference Proceedings
3. *REACTION KINETICS OF EPITAXIAL SILICON DEPOSITION AT 200-400o USING REMOTE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION
Anthony, B. ; Hsu, T. ; Breaux, L. ; Banerjee, S. ; Tasch, A.
Pub. info.: Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A..  pp.145-150,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 165
4.

Conference Proceedings
Conference Proceedings
4. REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF EPITAXIAL SILICON ON SILICON (100) AT 150oC
Hsu, T. ; Anthony, B. ; Breaux, L. ; Banerjee, S. ; Tasch, A.
Pub. info.: Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A..  pp.139-144,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 165
5.

Conference Proceedings
Conference Proceedings
5. Overgated Thin Film Transistor for SRAM Load Devices
Nguyen, B.Y. ; Tobin, P.J. ; McNelly, T.F. ; Hayden, J.D. ; Breaux, L. ; Hegde, R.
Pub. info.: Proceedings of the Second Symposium on Thin Film Transistor Technologies.  pp.316-325,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-35
6.

Conference Proceedings
Conference Proceedings
6. THE USE OF LANGMUIR PROBE MEASUREMENTS TO STUDY REACTION KINETICS IN REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION OF SILICON
Anthony, B. ; Hsu, T. ; Breaux, L. ; Qian, R. ; Baner-jee, S. ; Tasch, A.
Pub. info.: Plasma processing and synthesis of materials III : symposium held April 17-19, 1990, San Francisco, California, U.S.A..  pp.267-272,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 190