1.

Conference Proceedings
Conference Proceedings
1. BEAM-ASSISTED CVD OF MICROELECTRONIC FILMS
Emery, K. A. ; Thompson, L. R. ; Bishop, D. ; Zarnani, H. ; Boyer, P. K. ; Moore, P. K. ; Rocca, J. J. ; Collins, G. J.
Pub. info.: Laser-controlled chemical processing of surfaces : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.81-92,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 29
2.

Conference Proceedings
Conference Proceedings
2. *LASER PHOTOLYTIC DEPOSITION OF THIN FILMS
Boyer, P. K. ; Moore, C. A. ; Solanki, R. ; Richie, W. K. ; Roche, G. A ; Collins,. G. J.
Pub. info.: Laser diagnostics and photochemical processing for semiconductor devices : symposium held November 1982 in Boston, Massachusetts, U.S.A..  pp.119-128,  1983.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 17