1.

Conference Proceedings
Conference Proceedings
1. ISIS; an Information-efficient Spectral Imaging System
Sweatt, W.C. ; Boye, C.A. ; Gentry, S.M. ; Descour, M.R.
Pub. info.: Imaging spectrometry IV : 20-21 July, 1998, San Diego, California.  pp.98-106,  1998.  Bellingham, Washington.  SPIE
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3438
2.

Conference Proceedings
Conference Proceedings
2. Industry survey on nonvisual defect detection
Boye, C.A.
Pub. info.: Process and Materials Characterization and Diagnostics in IC Manufacturing.  pp.173-182,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5041
3.

Conference Proceedings
Conference Proceedings
3. A new optical technique for monitoring wafer curvature and stress during copper damascene processing
Boye, C.A. ; Carpio, R. ; Woodring, J. ; Owen, D.M.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.328-336,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375