1.

Conference Proceedings
Conference Proceedings
1. Strip Process Optimization for Porous ULK Films
Kalinowski, I.J. ; Bourlot, C. ; Marfoure, A. ; Louveau, O. ; Li, S. ; Su, J. ; Hills, G.W. ; Louis, D.
Pub. info.: Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium.  pp.216-223,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-10
2.

Conference Proceedings
Conference Proceedings
2. Monitoring of photo-resist poisoning
Simon, J. ; Weisbuch, F. ; Quere, Y. ; Louveau, O. ; Bourlot, C.
Pub. info.: Advances in Resist Technology and Processing XX.  1  pp.303-309,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039