1.

Conference Proceedings
Conference Proceedings
1. Liquid, Methoxylated Polysiloxane/Silica Hybrid Resins By a Non-Hydrolytic Route
Bourget, L. ; Mutin, P. H. ; Vioux, A.
Pub. info.: Organic/inorganic hybrid materials : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.351-,  1998.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 519
2.

Conference Proceedings
Conference Proceedings
2. Optimization of a Low Damage, High Resolution SiNx Etch Process in an Electron Cyclotron Resonance (ECR) Reactor with Multipolar Confinement
Olson, R.J. ; Kazior, T.E., Jr. ; Lane, B. ; Holber, W.M. ; Bourget, L.
Pub. info.: Proceedings of the Symposium on Nondestructive Wafer Characterization for Compound Semiconductor Materials and the twenty-second State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXII).  pp.252-261,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-6