1.

Conference Proceedings

Conference Proceedings
Ren,K.J. ; Leonard,Q.J. ; Vladimirsky,Y. ; Bourdillon,A.J.
Pub. info.: Emerging lithographic technologies IV : 28 February-1 March 2000, Santa Clara, USA.  pp.721-728,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3997
2.

Conference Proceedings

Conference Proceedings
Soo,C.P. ; Chandra,S. ; Kong,J.R. ; Bourdillon,A.J. ; Lu,B.
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part1  pp.63-69,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
3.

Conference Proceedings

Conference Proceedings
Zhou,JP ; Dou,S.X. ; Liu,H.K. ; Bourdillon,A.J. ; Sorrell,C.C.
Pub. info.: Proceedings of the International Ceramic Conference AUSTCERAM 88, [held in] Sydney, Australia, 21-26 August 1988.  pp.323-328,  1988.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 34-36
4.

Conference Proceedings

Conference Proceedings
Dou,SX. ; Liu,H.K. ; Zhou,J.P. ; Bourdillon,A.J. ; Savvides,N. ; Apperley,M.H. ; Gouch,A.J. ; Sorrell,C.C.
Pub. info.: Proceedings of the International Ceramic Conference AUSTCERAM 88, [held in] Sydney, Australia, 21-26 August 1988.  pp.341-344,  1988.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 34-36
5.

Conference Proceedings

Conference Proceedings
Logren,H.J. ; Lindh,E.M. ; Sorrell,C.C. ; Dou,S.X. ; Liu,H.K. ; Bourdillon,A.J.
Pub. info.: Proceedings of the International Ceramic Conference AUSTCERAM 88, [held in] Sydney, Australia, 21-26 August 1988.  pp.329-334,  1988.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 34-36
6.

Conference Proceedings

Conference Proceedings
Liu,H.K. ; Dou,S.X. ; Savvides,N. ; Zhou,J.P. ; Tan,N.X. ; Bourdillon,A.J. ; Sorrell,C.C.
Pub. info.: Proceedings of the International Ceramic Conference AUSTCERAM 88, [held in] Sydney, Australia, 21-26 August 1988.  pp.309-314,  1988.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 34-36
7.

Conference Proceedings

Conference Proceedings
Soo,C.P. ; Fan,M.H. ; Bourdillon,A.J. ; Chan,L.H.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.727-734,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
8.

Conference Proceedings

Conference Proceedings
Tan,N.X. ; Bourdillon,A.J. ; Dou,S.X. ; Liu,H.K. ; Sorrell,C.C.
Pub. info.: Proceedings of the International Ceramic Conference AUSTCERAM 88, [held in] Sydney, Australia, 21-26 August 1988.  pp.351-354,  1988.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 34-36
9.

Conference Proceedings

Conference Proceedings
Dou,S.X. ; Liu,H.K. ; Bourdillon,A.J.
Pub. info.: Proceedings of the International Ceramic Conference AUSTCERAM 88, [held in] Sydney, Australia, 21-26 August 1988.  pp.355-358,  1988.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 34-36
10.

Conference Proceedings

Conference Proceedings
Apperley,M.H. ; Gouch,A.J. ; Dou,S.X. ; Liu,H.K. ; Bourdillon,A.J. ; Sorrell,C.C.
Pub. info.: Proceedings of the International Ceramic Conference AUSTCERAM 88, [held in] Sydney, Australia, 21-26 August 1988.  pp.359-362,  1988.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 34-36