1.

Conference Proceedings
Conference Proceedings
1. A Study of Mechanisms of Enhanced Diffusion of Boron During Rapid Thermal Processing (RTP)
Park, H. ; Merchant, T. ; Loechelt, G. ; Ren, J. ; Borucki, L. ; Christiansen, J. ; Egan, E.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.325-332,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9
2.

Conference Proceedings
Conference Proceedings
2. Management of Variable Geometry in Thermal Analysis for Communication Equipment with Rotating Parts
Borucki, L.
Pub. info.: 4th European Symposium on Space Environmental Control Systems, Florence, Italy, 21-24 October 1991.  pp.187-194,  1991.  Noordwijk.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 324
3.

Conference Proceedings
Conference Proceedings
3. Determining the Effect of Slurry Flow Rate on the Tribological, Thermal and Removal Rate Attributes of Copper CMP
Li, Z. ; Borucki, L. ; Philiopssian, A.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.104-113,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21
4.

Conference Proceedings
Conference Proceedings
4. Heating and Convection in Copper Polishing
Borucki, L. ; Li, Z. ; Philipossian, A.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.61-67,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21
5.

Conference Proceedings
Conference Proceedings
5. Analysis of Frictional Heating of Grooved and Flat CMP Polishing Pads
Borucki, L. ; Charns, L. ; Philipossian, A.
Pub. info.: Chemical Mechanical Planarization : proceedings of the International Symposium.  pp.173-181,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-21