1.
Conference Proceedings
Hruby,J.M. ; Griffiths,S.K. ; Domeier,L.A. ; Morales,A.M. ; Boehme,D.R. ; Bankert,M.A. ; Bonivert,W.D. ; Hachmann,J.T. ; Skala,D.M. ; Ting,A.
Pub. info.:
Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California . pp.32-43, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3874
2.
Conference Proceedings
Jackson,K.H. ; Malek,C.Khan ; Murray,L.P. ; Bonivert,W.D. ; Hruby,J.M. ; Hachmann,J.T. ; Chang,T.H.P.
Pub. info.:
Microlithography and Metrology in Micromachining . pp.204-213, 1995. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2640
3.
Conference Proceedings
Brennen,R.A. ; Hecht,M.H. ; Wiberg,D.V. ; Manion,S.J. ; Bonivert,W.D. ; Hruby,J.M. ; Pister,K.S.J. ; Kruglick,E.
Pub. info.:
Microlithography and Metrology in Micromachining . pp.226-235, 1995. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2640
4.
Conference Proceedings
Brennen,R.A. ; Hecht,M.H. ; Wiberg,D.V. ; Manion,S.J. ; Bonivert,W.D. ; Hruby,J.M. ; Scholz,M.L. ; Stowe,T.D. ; Kenny,T.W. ; Jackson,K.H. ; Malek,C.Khan
Pub. info.:
Microlithography and Metrology in Micromachining . pp.214-225, 1995. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2640