1.

Conference Proceedings
Conference Proceedings
1. Flexible distributed architecture for semiconductor process control and experimentation
Gower,A.E. ; Boning,D.S. ; Mcllrath,M.B.
Pub. info.: Open Architecture Control Systems and Standards.  pp.146-158,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2912
2.

Conference Proceedings
Conference Proceedings
2. Architecture for distributed design and fabrication
Mcllrath,M.B. ; Boning,D.S. ; Troxel,D.E.
Pub. info.: Plug and Play Software for Agile Manufacturing.  pp.134-147,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2913
3.

Conference Proceedings
Conference Proceedings
3. Statistical metrology:understanding spatial variation in semiconductor manufacturing
Boning,D.S. ; Chung,J.E.
Pub. info.: Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II.  pp.16-26,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2874
4.

Conference Proceedings
Conference Proceedings
4. Inter-and intra-die polysilicon critical dimension variation
Stine,B.E. ; Boning,D.S. ; Chung,J.E. ; Bell,D.A. ; Equi,E.
Pub. info.: Microelectronic Manufacturing Yield, Reliability, and Failure Analysis II.  pp.27-35,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2874
5.

Conference Proceedings
Conference Proceedings
5. Evaluation of pad life in chemical mechanical polishing process using statistical metrology
Muthukrishnan,N.M. ; Prasad,S. ; Stine,B.E. ; Loh,W. ; Nagahara,R. ; Chung,J.E. ; Boning,D.S.
Pub. info.: Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III.  pp.70-79,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3216