1.

Conference Proceedings
Conference Proceedings
1. Self-aligned silicide process technology for sub-0.25-ｦﾌm geometries
White,T.R. ; Kolar,D. ; Jahanbani,M. ; Frisa,L.E. ; Nagabushnam,R. ; Chuang,H. ; Tsui,P. ; Cope,J. ; Pulvirent,L. ; Bolton,S.
Pub. info.: Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California.  pp.112-119,  1998.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3506
2.

Conference Proceedings
Conference Proceedings
2. Yield issues with local interconnect
Henis,N.B. ; Bolton,S. ; Montez,R. ; Legg,J. ; Kim,S. ; Vuong,Q.
Pub. info.: Microelectronic Manufacturing Yield, Reliability, and Failure Analysis IV.  pp.179-185,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3510