1.

Conference Proceedings
Conference Proceedings
1. The Effect of Oxygen on the Electrical Activation and Diffusion of Ion-Implanted Boron
Larsen, K. Kyllesbech ; Stolk, P. A. ; Privitera, V. ; Berkum, J. G. M. van ; Boer, W. B. de ; Mannino, G. ; Cowern, N. E. B. ; Huizing, H. G. A.
Pub. info.: Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.291-,  1997.  Pittsburg, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 469
2.

Conference Proceedings
Conference Proceedings
2. Ostwald Ripening of {113} Defects Precursors and Transient Enhanced Diffusion
Mannino, G. ; Cowern, N. E. B. ; Stolk, P. A. ; Roozeboom, F. ; Huizing, H. G. A. ; Berkum, J. G. M. van ; Boer, W. B. de ; Cristiano, F. ; Claverie, A. ; Jaraiz, M.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A..  pp.163-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 568
3.

Conference Proceedings
Conference Proceedings
3. The Necessity of RTCVD in Advanced Epitaxial Growth of Si and SiGe
Boer, W. B. de ; Theunissen, M. J. J. ; Linden, R. H. J. Van Der
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.287-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387
4.

Conference Proceedings
Conference Proceedings
4. Thermal Stability of SiGe/Si Quantum-Well Structures Grown by APCVD
Zhao, Q. X. ; Nur, O. ; Sodervall, U. ; Patel, C. J. ; Willander, M. ; Holtz, P. O. ; Boer, W. B. de
Pub. info.: Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.345-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 533
5.

Conference Proceedings
Conference Proceedings
5. Loading Effects During Low-Temperature SEG of Si and SiGe
Boer, W. B. de ; Terpstra, D. ; Dekker, R.
Pub. info.: Epitaxy and applications of si-based heterostructures : symposium held April 13-17, 1998, San Francisco, California, U.S.A..  pp.315-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 533