1.

Conference Proceedings
Conference Proceedings
1. Electron-beam mask repair with induced reactions
Koops, H.W.P. ; Edinger, K. ; Bihr, J. ; Boegli, V.A. ; Greiser, J.
Pub. info.: 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents.  pp.90-97,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5148
2.

Conference Proceedings
Conference Proceedings
2. Application of electron-beam-induced processes to mask repair
Edinger, K. ; Boegli, V.A. ; Budach, M. ; Hoinkis, O. ; Weyrauch, B. ; Koops, H.W.P. ; Bihr, J. ; Greiser, J.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology X.  pp.383-390,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5130
3.

Conference Proceedings
Conference Proceedings
3. Electron-beam-induced processes and their applicability to mask repair
Boegli, V.A. ; Koops, H.W.P. ; Budach, M. ; Edinger, K. ; Hoinkis, O. ; Weyrauch, B. ; Becker, R. ; Schmidt, R. ; Kaya, A. ; Reinhardt, A. ; Brauuer, C. ; Honold, H. ; Bihr, J. ; Greiser, J. ; Eisenmann, M.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.283-292,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
4.

Conference Proceedings
Conference Proceedings
4. A novel electron-beam-based photomask repair tool
Edinger, K. ; Becht, H. ; Becker, R. ; Bert, V. ; Boegli, V.A. ; Budach, M. ; Gyhde, S. ; Guyot, J. ; Hofmann, T. ; Hoinkis, O. ; Kaya, A. ; Koops, H.W. ; Spies, P. ; Weyrauch, B. ; Bihr, J.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.1222-1231,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256