1.

Conference Proceedings
Conference Proceedings
1. Estimating cross-section semiconductor structure by comparing top-down SEM images
Price, J.R. ; Bingham, P.R. ; Tobin, K.W. Jr., ; Karnowski, T.P.
Pub. info.: Machine vision applications in industrial inspection XI :proceedings of electronic imaging science and technology 2003 : 22-24 January 2003, Santa Clara, California, USA.  pp.161-170,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5011
2.

Conference Proceedings
Conference Proceedings
2. Direct to digital holography for semiconductor wafer defect detection and review(Invited Paper)
Thomas, C.E., Jr. ; Bahm, T.M. ; Baylor, L.R. ; Bingham, P.R. ; Burns, S.W. ; Chidley, M.D. ; Dai, X.L. ; Delahanty, R.J. ; Doti, C.J. ; El-Khashab, A. ; Fisher, R.L. ; Gilbert, J.M. ; Goddard, J.S. ; Hanson, G.R. ; Hickson, J.D. ; Hunt, M.A. ; Hylton, K.W. ; John, G.C. ; Jones, M.L. ; MacDonald, K.R. ; Mayo, M.W. ; McMackin, I. ; Patek, D.R. ; Price, J.H. ; Rasmussen, D.A. ; Schaefer, L.J. ; Scheidt, T.R. ; Schulze, M.A. ; Schumaker, P.D. ; Shen, B. ; Smith, R.G. ; Su, A.N. ; Tobin, K.W., Jr. ; Usry, W.R. ; voelkl, E. ; Weber, K.S. ; Jones, P.G. ; Owen, R.W.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.180-194,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
3.

Conference Proceedings
Conference Proceedings
3. Spatial heterodyne interferometry techniques and applications in semiconductor water manufacturing
Bingham, P.R. ; Tobin, K.W. ; Hanson, G.R. ; Simpson, J.T.
Pub. info.: Interferometry XII: Techniques and Analysis.  pp.289-298,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5531
4.

Conference Proceedings
Conference Proceedings
4. Sidewall structure estimation from CD-SEM for lithographic process control
Bingham, P.R. ; Price, J.R. ; Tobin, K.W., Jr. ; Karnowski, T.P. ; Bennett, M.H. ; Bogardus, E.H. ; Bishop, M.
Pub. info.: Process and Materials Characterization and Diagnostics in IC Manufacturing.  pp.115-126,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5041
5.

Conference Proceedings
Conference Proceedings
5. Detection of cavitation pits on steel surfaces using SEM imagery
Price, J.R. ; Hylton, K.W. ; Tobin, K.W., Jr. ; Bingham, P.R. ; Hunn, J.D. ; Haines, J.R.
Pub. info.: Sixth International Conference on Quality Control by Artificial Vision.  pp.476-484,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5132
6.

Conference Proceedings
Conference Proceedings
6. Semiconductor sidewall shape estimation using top-down CD-SEM image retrieval
Price, J.R. ; Bingham, P.R. ; Tobin, K.W., Jr. ; Karnowski, T.P.
Pub. info.: Sixth International Conference on Quality Control by Artificial Vision.  pp.209-219,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5132
7.

Conference Proceedings
Conference Proceedings
7. Preliminary results for mask metrology using spatial heterodyne interferometry
Bingham, P.R. ; Tobin, K. ; Bennett, M.H. ; Marmillion, P.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.1331-1342,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
8.

Conference Proceedings
Conference Proceedings
8. Phase defect detection with spatial heterodyne interferometry
Bingham, P.R. ; Tobin, K.W. ; Bennett, M.H. ; Marmillion, P.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.18-28,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375