1.

Conference Proceedings
Conference Proceedings
1. Multibeam high-resolution UV wavelength reticle inspection
Hung,C.C. ; Yoo,C.S. ; Lin,C.H. ; Volk,W.W. ; Wiley,J.N. ; Khanna,S. ; Biellak,S. ; Wang,D.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.520-531,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409
2.

Conference Proceedings
Conference Proceedings
2. Multibeam high-resolution UV wavelength reticle inspection
Hung,C.C. ; Yoo,C.S. ; Lin,C.-H. ; Volk,W.W. ; Wiley,J.N. ; Khanna,S. ; Biellak,S. ; Wang,D.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.165-172,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186