Huttner, T. ; Mahnkopf, R. ; Wurzer, H. ; Biebl, M. ; Abstreiter, G.
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Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices. pp.277-282, 1997. Pennington, NJ. Electrochemical Society
Pindl, S. ; Biebl, M. ; Hammerl, E. ; Schaefer, H. ; von Philipsborn, H.
Pub. info.:
ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.623-632, 1997. Pennington, NJ. Electrochemical Society