Gardner, M. ; Fulford, J. ; Bhat, M. ; Kwong, D.L.
Pub. info.:
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.357-362, 1994. Pennington, NJ. Electrochemical Society
Bhat, M. ; Yoon, G.W. ; Kim, J. ; Han, L,K. ; Yan, J. ; Wristers, D. ; Kwong, D.L.
Pub. info.:
Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.317-327, 1994. Pennington, NJ. Electrochemical Society
Han, L. K. ; Bhat, M. ; Yan, J. ; Wristers, D. ; Kwong, D. L.
Pub. info.:
Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.. pp.221-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Bhat, M. ; Cho, T.H. ; Yan, J. ; Han, L.K. ; Kwong, D.L.
Pub. info.:
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.472-484, 1995. Pennington, NJ. Electrochemical Society