1.

Conference Proceedings
Conference Proceedings
1. Performance characteristics of ultranarrow ArF Laser for DUV Lithography
Ershov,A.I. ; Besaucele,H. ; Das,P.P.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.1030-1037,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings
Conference Proceedings
2. Improvement in the performance of a high-average-power XeCl laser
Lacour,B. ; Brunet,H. ; Gagnol,C. ; Vincent,B. ; Besaucele,H.
Pub. info.: XI International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference : 25-30 August 1996, Heriot-Watt University, Edinburgh, UK.  pp.362-365,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3092
3.

Conference Proceedings
Conference Proceedings
3. Performance of very high repetition rate ArF lasers
Hueber,J.-M. ; Besaucele,H. ; Das,P.P. ; Eis,R. ; Ershov,A.I. ; Fleurov,V.B. ; Gaidarenko,D. ; Hofmann,T. ; Melcher,P.C. ; Partlo,W.N. ; Nikolaus,B.K. ; Smith,S. ; Webb,K.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1418-1423,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
4.

Conference Proceedings
Conference Proceedings
4. Comparison of ArF and KrF laser performance at 2 kHz for microlithography
Besaucele,H. ; Das,P.P. ; Duffey,T.P. ; Embree,T.J. ; Ershov,A.I. ; Fleurov,V.B. ; Grove,S.L. ; Melcher,P.C. ; Ness,R. ; Padmabandu,G.G.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part2  pp.1476-1480,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000