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19 results

Conference Proceedings

1. COMPOSITION ANALYSIS OF RF PLASMA-DEPOSITED AMORPHOUS SILICON OXYNITRIDE THIN FILMS BY SPECTROSCOPIC PHASE-MODULATED ELLIPSOMETRY

Campmany, J. ; Andujar, J.L. ; Canillas, A. ; Costa, J. ; Bertran, E.

Pub. info.:	Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.. pp.351-356, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	284

Conference Proceedings

2. Thermal Stabilization And Crystallization Of Nanometric Particles Of Si-C-N Produced By RF-Plasma Enhanced Chemical-Vapor-Deposition

Bertran, E. ; Farjas, J. ; Garcia-Caurel, E. ; Polo, M. C. ; Roura, P. ; Viera, G.

Pub. info.:	Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A.. pp.A24.5-, 2001. Warrendale. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	609

Conference Proceedings

3. PRODUCTION OF SILICON POWDER BY SQUARE-WAVE MODULATED RF SILANE PLASMA

Costa, J. ; Sardin, G. ; Campmany, J. ; Andujar, J.L. ; Canillas, A. ; Bertran, E.

Pub. info.:	Nanophase and nanocomposite materials : symposium held December 1-3, 1992, Boston, Massachusetts, U.S.A.. pp.155-160, 1993. Pittsburg, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	286

Conference Proceedings

4. PERCOLATION BEHAVIOUR IN THE ELECTRICAL CHARACTERISTICS OF HYDROGENATED AMORPHOUS SILICON NITRIDE FILMS

Lopez-Villegas, J.M. ; Garrido, B. ; Benrakkad, M.S. ; Samitier, J. ; Bertran, E. ; Canillas, A. ; Morante, J.R.

Pub. info.:	Amorphous silicon technology, 1992. pp.655-660, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	258

Conference Proceedings

5. COMPARATIVE STUDY OF THE OPTICAL AND VIBRATIONAL PROPERTIES OF a-SiNX:H FILMS PREPARED FROM SiH4-N2 AND SiH4-NH3 GAS MIXTURES BY RF PLASMA

Campmany, J. ; Bertran, E. ; Andujar, J.L. ; Canillas, A. ; Lopez-Villegas, J.M. ; Morante, J.R.

Pub. info.:	Amorphous silicon technology, 1992. pp.643-648, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	258

Conference Proceedings

6. AMORPHOUS SILICON THIN FILM TRANSISTORS WITH HIGH ELECTRON FIELD EFFECT MOBILITY

Andujar, J.L. ; Bertran, E. ; Canillas, A. ; Campmany, J. ; Cifre, J.

Pub. info.:	Amorphous silicon technology, 1992. pp.1007-1012, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	258

Conference Proceedings

7. MICROSTRUCTURAL AND VIBRATIONAL CHARACTERIZATION OF THE HYDROGENATED AMORPHOUS SILICON POWDERS

Costa, J. ; Sardin, G. ; Campmany, J. ; Andujar, J.L. ; Canillas, A. ; Bertran, E.

Pub. info.:	Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A.. pp.1031-1036, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	297

Conference Proceedings

8. Real Time Ellipsometric Study of Boron Nitride Thin Film Growth

Bertran, E. ; Canillas, A. ; Campmany, J. ; Kasmi, M. El ; Pascual, E. ; Costa, J. ; Andujar, J. L.

Pub. info.:	Covalent ceramics III - science and technology of non-oxides : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.307-, 1996. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	410

Conference Proceedings

9. Thermal Desorption of Hydrogen in Si and SiC Nanoparticles Produced by Plasma-Enhanced Chemical Vapor Deposition

Costa, J. ; Fort, J. ; Sunol, J. J. ; Roura, P. ; Viera, G. ; Bertran, E.

Pub. info.:	Hydrogen in semiconductors and metals : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.427-, 1998. Warrendale, Penn.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	513

10.

Conference Proceedings

10. Structural Characterization and Crystallization Process of Nanostructured Silicon Thin Films Produced in Low-Pressure Silane Plasma

Viera, G. ; Cabarrocas, P. Roca i ; Costa, J. ; Martinez, S. ; Bertran, E.

Pub. info.:	Amorphous and microcrystalline silicon technology - 1998 : symposium held April 14-17, 1998, San Francisco, California, U.S.A.. pp.933-, 1999. Warrendale. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	507

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Author: Bertran, E.