1.

Conference Proceedings
Conference Proceedings
1. Low-temperature quartz-to-silicon bonding for SAW applications
Berthold,A. ; Sarro,P.M. ; Vallekoop,M.J.
Pub. info.: Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California.  pp.81-85,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3328
2.

Conference Proceedings
Conference Proceedings
2. Influence of processes and selective bonding technology
Jiao,J. ; Berthold,A. ; Vellekoop,M.J. ; French,P.J.
Pub. info.: Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas.  pp.245-252,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3223
3.

Conference Proceedings
Conference Proceedings
3. Micromachined wet cell for a Love-wave liquid sensor
Curtin,S.D. ; Jakoby,B. ; Berthold,A. ; Varadan,V.K. ; Varadan,V.V. ; Vellekoop,M.J.
Pub. info.: Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California.  pp.194-200,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3328
4.

Conference Proceedings
Conference Proceedings
4. Backwafer optical lithography and wafer distortion in substrate transfer technologies
Zeijl,H.W.van ; Slabbekoom,J. ; Nanver,L.K. ; Dijk,P.W.L.Van ; Berthold,A. ; Machielsen,T.
Pub. info.: Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA.  pp.200-207,  2000.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4181