1.

Conference Proceedings
Conference Proceedings
1. Ultrathin NO/N2O oxynitride dielectric for advanced flash memory application: Single wafer and batch technology
Zonca, R. ; Crivelli, B. ; Polignano, M. L. ; Cazzaniga, F. ; Alessandri, M. ; Caricato, A. P. ; Bersani, M. ; Sbetti, M. ; Vanzetti, L. ; Xing, G. C. ; Miner, G. E. ; Astici, N. ; Kuppurao, S. ; Lopes, D. ; Nesso, S.
Pub. info.: Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.141-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 592
2.

Conference Proceedings
Conference Proceedings
2. Characterization of nitrided silicon-silicon dioxide interfaces
Polignano, M. L. ; Alessandri, M. ; Brazzelli, D. ; Crivelli, B. ; Ghidini, G. ; Zonca, R. ; Caricato, A. P. ; Bersani, M. ; Sbetti, M. ; Vanzetti, L. ; Xing, G. C. ; Miner, G. E. ; Astici, N. ; Kuppurao, S. ; Lopes, D.
Pub. info.: Nondestructive methods for materials characterization : symposium held November 29-30, 1999, Boston, Massachusetts, U.S.A..  pp.207-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 591
3.

Conference Proceedings
Conference Proceedings
3. Quantitative Evaluation of Iron at the Silicon Surface after Wet Cleaning Treatments
Caputo, D. ; Bacciaglia, P. ; Carpanese, C. ; Polignano, M.L. ; Lazzeri, P. ; Bersani, M. ; Vanzetti, L. ; Pianetta, P. ; Moro, L.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah.  pp.493-504,  2003.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5133
4.

Conference Proceedings
Conference Proceedings
4. Indium in Silicon: A Study on Diffusion and Electrical Activation
Scalese, S. ; Magna, A. La ; Mannino, G. ; Privitera, V. ; Bersani, M. ; Giubertoni, D. ; Solmi, S. ; Pichler, P.
Pub. info.: CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A..  pp.205-210,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 765
5.

Conference Proceedings
Conference Proceedings
5. Characterization of a Thermal Oxidation Process on SiC Preamorphized by Ar Ion Implantation
Poggi, A. ; Nipoti, R. ; Solmi, S. ; Bersani, M. ; Vanzetti, L.
Pub. info.: Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003.  pp.1357-1360,  2004.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 457-460
6.

Conference Proceedings
Conference Proceedings
6. Fabrication by rf-sputtering processing of Er3 + /Yb3 + -codoped silica-titania planar waveguides
Chiasera, A. ; Montagna, M. ; Tosello, C. ; Goncalves, R.R. ; Zampedri, L. ; Ferrari, M. ; Brenci, M. ; Pelli, S. ; Righini, G.C. ; Bersani, M. ; Lazzeri, P. ; Casa, P.D.
Pub. info.: Integrated Optical Devices: Fabrication and Testing.  pp.53-61,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4944