Search records | 東京工業大学附属図書館文献データベース

Sort order

4 results

Conference Proceedings

1. 3-D polymeric microfluidic devices for BioMOEMS applications

Blanco, F. J. ; Berganzo, J. ; Garcia, J. ; Mayora, K. ; Calle, A. ; Lechuga, L. M.

Pub. info.:	Bioengineered and bioinspired systems II : 9-11 May 2005 Seville, Spain. pp.127-137, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5839

Conference Proceedings

2. Novel low-temperature CMOS-compatible full-wafer-bonding process for the fabrication of 3D embedded microchannels using SU-8

Blanco, F.J. ; Agirregabiria, M. ; Tijero, M. ; Berganzo, J. ; Garcia, J. ; Arroyo, M. ; Ruano, J.M. ; Aramburu, I. ; Mayora, K.

Pub. info.:	Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia. pp.131-142, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5276

Conference Proceedings

3. Low-cost thermal flow sensor for home-appliances applications

Sabate, N. ; Gracia, I. ; Cane, C. ; Berganzo, J. ; Puicorbe, J. ; Morante, J.R.

Pub. info.:	Design, test, integration, and packaging of MEMS/MOEMS 2002 : 6-8 May, 2002, Cannes, France. pp.549-555, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4755

Conference Proceedings

4. Compatibility of gas and flow sensor technology fabrication

Sabate, N. ; Gracia, I. ; Cane, C. ; Puigcorbe, J. ; Cerda, J. ; Morante, J.R. ; Berganzo, J.

Pub. info.:	Smart Sensors, Actuators, and MEMS. 1 pp.120-127, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5116