1.

Conference Proceedings

Conference Proceedings
Benzler,T. ; Piotter,V. ; Hanemann,T. ; Mueller,K. ; Norajitra,P. ; Ruprecht,R. ; Hausselt,J.H.
Pub. info.: Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California.  pp.53-60,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3874
2.

Conference Proceedings

Conference Proceedings
Piotter,V. ; Benzler,T. ; Hanemann,T. ; H.Wo1lmer ; Ruprecht,R. ; HauBelt,J.H.
Pub. info.: Design, test, and microfabrication of MEMS and MOEMS : 30 March-1 April 1999, Paris, France.  Part1  pp.456-463,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3680