1.

Conference Proceedings
Conference Proceedings
1. The Effect of Carbon/Self-Interstitial Clusters on Carbon Diffusion in Silicon Modeled by Kinetic Monte Carlo Simulations
Pinacho, Ruth ; Jaraiz, Martin ; Gossmann, Hans J. ; Gilmer, George H. ; Benton, Janet L. ; Werner, P.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B7.2-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 610
2.

Conference Proceedings
Conference Proceedings
2. Defect Evolution in Ion Implanted Si: From Point to Extended Defects
Libertino, Sebania ; Benton, Janet L. ; Coffa, Salvatore ; Eaglesham, Dave J.
Pub. info.: Atomistic mechanisms in beam synthesis and irradiation of materials : symposium held December 1-2, 1997, Boston, Massachusetts, U.S.A..  pp.3-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 504