1.

Conference Proceedings
Conference Proceedings
1. Demonstration of red/white projections and rod-Lcone color
McCann, J. J. ; Benton, J. L. ; McKee, S. P.
Pub. info.: Human vision and electronic imaging VII : 21-24 January 2002, San Jose, USA.  pp.324-330,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4662
2.

Conference Proceedings
Conference Proceedings
2. IDENTIFICATION OF INTERSTITIAL CARBON RELATED DEFECTS IN SILICON
Benton, J. L. ; Asom, M. T. ; Sauer, R. ; Kimerling, L. C.
Pub. info.: Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.85-92,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 104
3.

Conference Proceedings
Conference Proceedings
3. *DEFECTS INTRODUCED BY PLASMA PROCESSING OF SILICON
Benton, J. L.
Pub. info.: Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A..  pp.1027-1036,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 262
4.

Conference Proceedings
Conference Proceedings
4. METASTABLE DEFECT CONFIGURATIONS IN SEMICONDUCTORS,
Benton, J. L. ; Levinson, M.
Pub. info.: Defects in semiconductors II : symposium held November 1982 in Boston, Massachusetts, U.S.A..  pp.95-100,  1983.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 14
5.

Conference Proceedings
Conference Proceedings
5. The Effect of the Extra Ion on Residual Damage in MeV-Implanted Si
Libertino, S. ; Benton, J. L. ; Coffa, S. ; Jacobson, D. C. ; Eaglesham, D. J. ; Poate, J. M. ; Lavalle, M. ; Fuochi, P. G.
Pub. info.: Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.187-,  1997.  Pittsburg, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 469
6.

Conference Proceedings
Conference Proceedings
6. Impact of Metal Contamination of 7.0 nm Gate Oxides on Various Substrate Materials
Saito, S. ; Hamada, K. ; Eaglesham, D. J. ; Shiramizu, Y. ; Benton, J. L. ; Kitajima, H. ; Jacobson, S. D. C. ; Poate, J. M.
Pub. info.: Science and technology of semiconductor surface preparation : symposium held April 1-3, 1997, San Francisco, California, U.S.A..  pp.81-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 477
7.

Conference Proceedings
Conference Proceedings
7. Characterization of Interstitial Defect Clusters in Ion-Implanted Si
Benton, J. L. ; Libertino, S. ; Coffa, S. ; Eaglesham, D. J.
Pub. info.: Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.193-,  1997.  Pittsburg, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 469
8.

Conference Proceedings
Conference Proceedings
8. Interstitial Defect Reactions in Silicon
Zhao, S. ; Agarwal, A. M. ; Benton, J. L. ; Gilmer, G. H. ; Kimerling, L. C.
Pub. info.: Defects in electronic materials II : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.231-,  1997.  Pittsburgh, Penn.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 442
9.

Conference Proceedings
Conference Proceedings
9. HF-IMMERSION INDUCTIVELY COUPLED CARRIER LIFETIME CHARACTERIZATION OF FURNACE-OXIDE GROWTH
Boone, T. ; Higashi, G. S. ; Benton, J. L. ; Kistler, R. C. ; Weber, G. R. ; Keller, R. C. ; Makris, G.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.359-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315
10.

Conference Proceedings
Conference Proceedings
10. Metal contamination issues resulting from new Si processes
Benton, J. L. ; Boone, T. ; Jacobson, D.C. ; Lin, Wen ; Wilk, G.D. ; Krautter, H. W. ; Rosamilia, J.M. ; Rafferty, C.S.
Pub. info.: Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany.  pp.181-191,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-29